WaferPath is pleased to announce the first in a family of high quality, cost effective and reliable semiconductor wafer handling robots. The AR100 is software compatible drop-in-replacement for the aging legacy ATM-100 robots. The WaferPath AR100 is implemented with modern electronic and mechanical components, ensuring reliable operation well into the future.


Customers can be equally comfortable using the AR100 in both existing tools and for new designs. WaferPath has spent endless hours to ensure the AR100 is command set compatible to simplify replacement of aging legacy robots. The AR100 is self-contained, with an integrated controller to simplify the cabling required for the robot. An optional power supply allows the system integrator flexibility in how to power the AR100. The robot can be configured with either 10.5” or 14.4” arm reach.

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